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Esi sikhokelo sibanzi siphonononga ihlabathi le-silicon ye-front-end (FE), egubungela iipropati zayo, izicelo, kunye neziphumo zexesha elizayo. Singena kwiinkqubo zokuvelisa, izikhombisi eziphambili zokusebenza, kwaye sithelekise iintlobo ezahlukeneyo ze I-silicon ye-FE, inika ulwazi kwiingcali kunye nabanomdla ngokufanayo. Funda malunga nenkqubela phambili yokuqhubela izinto ezintsha kule teknoloji ibalulekileyo ye-semiconductor.
I-silicon ye-FE ibhekisa kumanqanaba okuqala okwenziwa kwe-silicon wafer. Iquka iinkqubo ezifana nokukhula kwekristale, ukunqunyulwa kwe-wafer, ukukrazula, ukupolisha, kunye ne-etching. La manyathelo abalulekile ekudaleni umgangatho ophezulu, ii-silicon substrates ezingenasiphako eziyimfuneko kwiisekethe ezidibeneyo (ICs). Umgangatho we I-silicon ye-FE Ichaphazela ngokuthe ngqo ukusebenza kunye nokuthembeka kwezixhobo zokugqibela zombane. Ukwahluka kobunyulu, ubume bekristale, kunye nokugqiba komphezulu kunempembelelo enkulu kwiimpawu zesixhobo.
Iipropati ezininzi eziphambili ziyalela ukufaneleka kwe I-silicon ye-FE kwizicelo ezahlukeneyo:
Umgangatho ophezulu I-silicon ye-FE sisiseko soluhlu olukhulu lwezixhobo zombane:
Iinkqubo ezahlukeneyo zokwenziwa kunye neenkcukacha zikhokelela kumanqanaba ahlukeneyo I-silicon ye-FE. Lo mahluko uchaphazela iindleko kunye nokusebenza.
| Ipropati | Uhlobo A | Uhlobo B |
|---|---|---|
| Ukuxhathisa (Ω·cm) | 1-10 | 10-100 |
| Uburhabaxa boMphezulu (nm) | <0.5 | <1.0 |
| Ubuninzi beSiphene (cm?2) | <100 | <500 |
Qaphela: Olu luthelekiso olwenziwe lula. Izicaciso ezizizo ziyahluka kakhulu ngokusekwe kumvelisi kunye neemfuno zesicelo.
Uphando oluqhubekayo kunye nophuhliso luqhubeka luphucula umgangatho kunye nobuchule be I-silicon ye-FE. Ukuqhubela phambili kubuchule bokukhula kwekristale, iindlela zonyango lomphezulu, kunye nolawulo lwesiphene zithembisa ukusebenza okuphezulu kunye neendleko eziphantsi. Phonononga izinto ezinokwenzeka ze I-Inner Mongolia i-Xinxin Silicon Industry Co.,Ltd yomgangatho ophezulu I-silicon ye-FE izisombululo.
Utshintsho oluya kwii-wafers ezinkulu zedayamitha, amanqanaba aphuculweyo okucoceka, kunye neendlela zokwenza inoveli ziqhuba ikamva le I-silicon ye-FE kunye nokusetyenziswa kwayo kwizinto zombane ezikumgangatho ophezulu.
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